Micromachined Circuits and Devices, Shiban Kishen Koul

Автор: Xiaoning Jiang, Sibo Li, Jianguo Ma, Wenbin Huang, Xiaohua Jian
Название: High Frequency Piezo-Composite Micromachined Ultrasound Transducer Array Technology for Biomedical Imaging
ISBN: 0791860442 ISBN-13(EAN): 9780791860441
Издательство: Mare Nostrum (Eurospan)
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Цена: 82770.00 T
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Описание: Explores the current advancement in high frequency piezoelectric crystal micromachined ultrasound transducers and arrays and their biomedical applications. Piezoelectric ultrasound transducers operating at high frequencies (> 20 MHz) are of increasing demand for medical imaging and biological particle manipulation involved therapy.

Автор: Jean Laconte; Denis Flandre; Jean-Pierre Raskin
Название: Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
ISBN: 1441939571 ISBN-13(EAN): 9781441939579
Издательство: Springer
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Цена: 139310.00 T
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Описание: Demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. This title also focuses on sensors design and characteristics, in which a novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process.

Автор: Shiban Kishen Koul, Sukomal Dey
Название: Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters
ISBN: 0815361432 ISBN-13(EAN): 9780815361435
Издательство: Taylor&Francis
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Цена: 163330.00 T
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Описание: The book covers extensive and systematic measurement study of the MEMS switches that includes mechanical, electrical, transient, linearity, power handling, temperature stability, loss and reliability. Study of switch reliability is one of the critical features in this book.

Автор: Mark R. Hornung; Oliver Brand
Название: Micromachined Ultrasound-Based Proximity Sensors
ISBN: 1461372690 ISBN-13(EAN): 9781461372691
Издательство: Springer
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Цена: 93160.00 T
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Описание: Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.

Автор: Robert Conant
Название: Micromachined Mirrors
ISBN: 1441953256 ISBN-13(EAN): 9781441953254
Издательство: Springer
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Цена: 113180.00 T
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Описание: Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed.
Miniaturization in electronic systems has led to radical improvements in computers and communications, and micromachining technologies promise to generate such improvements in miniaturized mechanical and optical systems, including specifically higher-speed, smaller, lower-cost scanning mirrors. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components.
There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Micromachined Mirrors presents descriptions of mirrors made from two fabrication processes - the surface-micromachining process and the staggered torsional electrostatic combdrive (STEC) high-aspect ratio micromachining process. The mirrors made using these two processes are evaluated for scan speed, optical resolution, ease of manufacture, and reliability.
Micromachined Mirrors also presents an example application of surface-micromachined mirrors: a raster-scanning projection video display. This demonstration shows the advantages of micromachined mirrors (small high-speed scanners) with special attention paid to the major drawback of surface-micromachined mirrors (lower resolution due to dynamic deformation). The successful demonstration of this simple prototype video display helps clarify the importance of the critical performance characteristics to consider when designing micromachined mirrors.