Micromachined Ultrasound-Based Proximity Sensors, Mark R. Hornung; Oliver Brand

Автор: Jean Laconte; Denis Flandre; Jean-Pierre Raskin
Название: Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
ISBN: 1441939571 ISBN-13(EAN): 9781441939579
Издательство: Springer
Рейтинг:
Цена: 139310.00 T
Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: Demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. This title also focuses on sensors design and characteristics, in which a novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process.