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Handbook of Silicon Semiconductor Metrology, 


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Название:  Handbook of Silicon Semiconductor Metrology
ISBN: 9780367397166
Издательство: Taylor&Francis
Классификация:
ISBN-10: 0367397161
Обложка/Формат: Paperback
Страницы: 896
Вес: 1.66 кг.
Дата издания: 20.12.2019
Язык: English
Размер: 252 x 173 x 41
Читательская аудитория: Tertiary education (us: college)
Основная тема: Electromagnetics & Microwaves
Ссылка на Издательство: Link
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Поставляется из: Европейский союз
Описание: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Introduction to Quantum Metrology

Автор: Waldemar Nawrocki
Название: Introduction to Quantum Metrology
ISBN: 3319384791 ISBN-13(EAN): 9783319384795
Издательство: Springer
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Цена: 104480.00 T
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Описание: This book presents the theory of quantum effects used in metrology and results of the author`s own research in the field of quantum electronics.

Mechanics of Accuracy in Engineering Design of Machines and Robots: Volume 2 Stiffness and Metrology

Автор: Vladimir T. Portman
Название: Mechanics of Accuracy in Engineering Design of Machines and Robots: Volume 2 Stiffness and Metrology
ISBN: 0791861694 ISBN-13(EAN): 9780791861691
Издательство: Mare Nostrum (Eurospan)
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Цена: 155230.00 T
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Описание: Accuracy provision, maintenance, and enhancement are hot problems in manufacturing and manufacturing science. This volume covers stiffness-compliance directly associated with the machine and robot accuracy through static deformations and computer-aided metrology aimed at final assessments of the accuracy-associated performance indexes.

Physics of metrology

Автор: Hebra, Alexius J.
Название: Physics of metrology
ISBN: 3709116740 ISBN-13(EAN): 9783709116746
Издательство: Springer
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Цена: 113180.00 T
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Описание: Conceived as a reference manual for practicing engineers, instrument designers, service technicians and engineering students. Historical anecdotes as far back as Hellenistic times to modern scientists help illustrate in an entertaining manner ideas ranging from impractical inventions in history to those that have changed our lives.

Introduction to Metrology Applications in IC Manufacturing

Автор: Bo Su, Eric Solecky, Alok Vaid
Название: Introduction to Metrology Applications in IC Manufacturing
ISBN: 1628418117 ISBN-13(EAN): 9781628418118
Издательство: Mare Nostrum (Eurospan)
Цена: 55170.00 T
Наличие на складе: Невозможна поставка.
Описание: Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis—specifically, precision, matching, and relative accuracy.

Metrology of Automated Tests: Static and Dynamic Characteristics

Автор: Viacheslav Karmalita
Название: Metrology of Automated Tests: Static and Dynamic Characteristics
ISBN: 3110666642 ISBN-13(EAN): 9783110666649
Издательство: Walter de Gruyter
Цена: 86720.00 T
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Описание:

This book offers an in-depth discussion related to metrological aspects of automated tests. The accuracy of experimental estimates of test object performance is examined from the standpoint of their statistical variance and systematic biases.

The proposed metrological model of automated tests allows to determine the metrological characteristics of measurement means using data from their static and dynamic calibrations. Knowledge of these characteristics provides an ability to examine their impact on the accuracy of test results for the purposes of estimating statistical uncertainties caused by instrumentation errors and eliminating biases that occur as a consequence of inertial properties of measurement means.

Optimization of requirements for measurement errors to ensure a given accuracy of test results is discussed as well.

Proposed approaches and described methods are illustrated by test examples of turbomachinery products.


Handbook Of Gan Semiconductor Mater

Название: Handbook Of Gan Semiconductor Mater
ISBN: 1498747132 ISBN-13(EAN): 9781498747134
Издательство: Taylor&Francis
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Цена: 275610.00 T
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Описание: This book addresses material growth, device fabrication, device application, and commercialization of energy-efficient white light-emitting diodes (LEDs), laser diodes, and power electronics devices. It covers the basics of semiconductor materials, physics, growth and characterization techniques.


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