Fundamental Principles of Optical Lithography: The Science of Microfabrication, Mack
Автор: Madou, Marc Название: Fundamentals of microfabrication ISBN: 0849308267 ISBN-13(EAN): 9780849308260 Издательство: Taylor&Francis Рейтинг: Цена: 86770.00 T Наличие на складе: Невозможна поставка. Описание: Explores the science of miniaturization, including its methods and materials, from the historical to the contemporary. This book provides the background, tools, and directions need to confidently choose fabrication methods and materials for a particular miniaturization problem.
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