Автор: Marc J. Madou Название: Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set ISBN: 0849331803 ISBN-13(EAN): 9780849331800 Издательство: Taylor&Francis Цена: 296030 T Наличие на складе: Нет в наличии. Описание: Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.
Автор: Mack Название: Fundamental Principles of Optical Lithography: The Science of Microfabrication ISBN: 0470727306 ISBN-13(EAN): 9780470727300 Издательство: Wiley Рейтинг: Цена: 61190.00 T Наличие на складе: Есть у поставщика Поставка под заказ. Описание: Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
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