Автор: Bruce W. Smith, Kazuaki Suzuki Название: Microlithography Science &Tech ISBN: 1439876754 ISBN-13(EAN): 9781439876756 Издательство: Taylor&Francis Цена: 168430 T Наличие на складе: Невозможна поставка. Описание: Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
Автор: Glendinning, William B. Название: Handbook Of Vlsi Microlithography ISBN: 0815512813 ISBN-13(EAN): 9780815512813 Издательство: Elsevier Science Рейтинг: Цена: 49390.00 T Наличие на складе: Есть у поставщика Поставка под заказ. Описание: Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.
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