Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets, Pampillуn Arce Marнa Бngela
Автор: Mar?a ?ngela Pampill?n Arce Название: Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets ISBN: 3319666061 ISBN-13(EAN): 9783319666068 Издательство: Springer Рейтинг: Цена: 102480.00 T Наличие на складе: Есть у поставщика Поставка под заказ. Описание: This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.