Micro Electronic and Mechanical Systems 9781681175034

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Автор: Zheng Yun Man
Название: Micro Electronic and Mechanical Systems
ISBN: 9781681175034
Издательство: Gazelle Book Services
Классификация:

Машиноведение

Электротехническое машиностроение

Электроника

ISBN-10: 1681175037
Обложка/Формат: Hardback
Страницы: 288
Вес: 0.00 кг.
Дата издания: 01.01.2017
Серия: Engineering
Язык: English
Размер: 229 x 152
Читательская аудитория: Postgraduate, research & scholarly
Ключевые слова: Electrical engineering
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Поставляется из: Англии
Описание: Micro-electromechanical systems (MEMS) is a technology that combines computers with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators embedded in semiconductor chips. Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. MEMS are already used as accelerometers in automobile air-bags. They have replaced a less reliable device at lower cost and show promise of being able to inflate a bag not only on the basis of sensed deceleration but also on the basis of the size of the person they are protecting. Basically, a MEMS device contains micro-circuitry on a tiny silicon chip into which some mechanical device such as a mirror or a sensor has been manufactured. Potentially, such chips can be built in large quantities at low cost, making them costeffective for many uses. Over the past several decades MEMS researchers and developers have demonstrated an extremely large number of microsensors for almost every possible sensing modality including temperature, pressure, inertial forces, chemical species, magnetic fields, radiation, etc. Remarkably, many of these micromachined sensors have demonstrated performances exceeding those of their macroscale counterparts. That is, the micromachined version of, for instance, a pressure transducer, usually outperforms a pressure sensor made using the most precise macroscale level machining techniques. Not only is the performance of MEMS devices exceptional, but their method of production leverages the same batch fabrication techniques used in the integrated circuit industry which can translate into low per-device production costs, as well as many other benefits. This book entitled Micro Electronic and Mechanical Systems deliberates significant aspects of MEMS technology areas that present the latest research developments in micro electronic and mechanical systems. The book states a wide range of fundamental and practical issues related to MEMS, advanced metal-oxidesemiconductor (MOS) and complementary metal-oxide-semiconductor (CMOS) devices, SoC technology, integrated circuit testing and verification, and other significant issues in the field.

Micro Electronic and Mechanical Systems, Zheng Yun Man