Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies, Du
Автор: Nguyen Van Toan, Takahito Ono Название: Capacitive Silicon Resonators: Performance Enhancement Methods ISBN: 0367217767 ISBN-13(EAN): 9780367217761 Издательство: Taylor&Francis Рейтинг: Цена: 117390.00 T Наличие на складе: Невозможна поставка. Описание: Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.
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