Polishing of Diamond Materials, Yiqing Chen; Liangchi Zhang

Автор: Jie Cheng
Название: Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect
ISBN: 9811061645 ISBN-13(EAN): 9789811061646
Издательство: Springer
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Цена: 121110.00 T
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Описание: This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.

Автор: Sandy Suet To; Hao Wang; Wing Bing Lee
Название: Materials Characterisation and Mechanism of Micro-Cutting in Ultra-Precision Diamond Turning
ISBN: 3662548216 ISBN-13(EAN): 9783662548219
Издательство: Springer
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Цена: 139750.00 T
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Описание: This book presents an in-depth study and elucidation on the mechanisms of the micro-cutting process, with particular emphasis and a novel viewpoint on materials characterization and its influences on ultra-precision machining.

Автор: Christopher Lyle Borst; William N. Gill; Ronald J.
Название: Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
ISBN: 1461354242 ISBN-13(EAN): 9781461354246
Издательство: Springer
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Цена: 130610.00 T
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Описание: As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects.

Автор: Cohen
Название: The Sidney Diamond Symposium - Materials Science of Concrete, Special Volume
ISBN: 1574980726 ISBN-13(EAN): 9781574980721
Издательство: Wiley
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Цена: 117160.00 T
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Описание: This book is a collection of papers from the symposium honoring Professor Sidney Diamond of the School of Civil Engineering, Purdue University, one of the leading scholars in the field of concrete science.

Автор: Wilhelm A.M. Kulisch
Название: Deposition of Diamond-Like Superhard Materials
ISBN: 366215627X ISBN-13(EAN): 9783662156278
Издательство: Springer
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Цена: 93160.00 T
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Описание: This book deals with the deposition of a certain class of materials, namely the diamond-like superhard materials, in the form of thin films. Starting from concepts used to improve the hardness of a material, it is shown that the intrinsic hardness is highest for materials with low bond lengths, high coordination numbers, and low ionicities.