Handbook of Sputter Deposition Technology,, Kiyotaka Wasa

Автор: Depla
Название: Reactive Sputter Deposition
ISBN: 3540766626 ISBN-13(EAN): 9783540766629
Издательство: Springer
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Цена: 214280.00 T
Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.

Автор: Donald M. Mattox
Название: Handbook of Physical Vapor Deposition
ISBN: 0815514220 ISBN-13(EAN): 9780815514220
Издательство: Elsevier Science
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Цена: 206330.00 T
Наличие на складе: Невозможна поставка.
Описание: Covers various aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. This book also covers substrate characterization, adhesion, cleaning and processing.