Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly, Ostrikov
Автор: Papadopoulos Название: Nanofabrication ISBN: 3319317407 ISBN-13(EAN): 9783319317403 Издательство: Springer Рейтинг: Цена: 52240.00 T Наличие на складе: Есть у поставщика Поставка под заказ. Описание: This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.
Автор: Utke, Ivo; Moshkalev, Stanislav; Russell, Phillip Название: Nanofabrication Using Focused Ion and Electron Beams ISBN: 0199734216 ISBN-13(EAN): 9780199734214 Издательство: Oxford Academ Рейтинг: Цена: 290400.00 T Наличие на складе: Невозможна поставка. Описание: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
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